Following the service, Ryan Adams and Lionel Richie reportedly gave surprise performances at the wedding.
The 40-year-old singer-songwriter took to the stage to serenade the couple with his guitar at their reception and Lionel then performed his hit Easy on a piano.
Cameron Diaz has married rocker Benji Madden. Photo / Getty
A source also revealed the former Good Charlotte rocker, 35, sent the 42-year-old actress a romantic note shortly before they exchanged vows in a traditional Jewish ceremony, while she was getting her make-up done with her bridesmaids, Nicole, Drew Barrymore, older sister Chimene Cain, and long-time assistant Jesse Lutz.
The insider told Us Weekly magazine: "It was a beautiful, heartfelt ceremony."
Cameron walked down the aisle in a backless white gown with lots of sparkle to Nat King Cole's track Stardust, while her bridesmaids all wore black dresses and carried white flowers.
Benji appeared to be nervous throughout their nuptials, as he accidentally dropped his ring during the ceremony, which was planned by Yifat Oren and Stefanie Cove.
The couple retired to a private room to spend approximately 30 minutes of quality time together after the ceremony - a Jewish wedding ritual known as Yichud.
The blonde beauty's mother, Billie Diaz, sister Chimene and film producer Jeffrey Katzenberg were among those who gave speeches at their cocktail reception.
Cameron changed into a short-sleeved, floor-length, embellished white dress shortly before the cake was cut at 10pm, and the newlyweds continued to party with 30 guests until midnight.
Madden was previously engaged to Australian actress Sophie Monk, and has dated Paris Hilton. Diaz's former lovers include Matt Dillon and Justin Timberlake.
- AAP and Bang Showbiz
